We first developed a virtual device structure to test how ALD thickness affects hole size uniformity and CD. We started our virtual experiment by using two crisscross SAQP processes and transferring a ...

We demonstrate the use of process modeling, virtual wafer fabrication, and virtual metrology in process development of advanced logic and memory. Accurate and predictive process modeling, in ...

Data modeling tools play an important role in business, representing how data flows through an organization. It’s important for businesses to understand what the best data modeling tools are across ...