IEEE

Elimination of Leakage in NaOH-Activated Cu/SiO2 Hybrid Bonding for Plasma-Free Surface Activation Scheme

Abstract: In this study, the effect of NaOH wet treatment on the leakage current in Cu/SiO2 hybrid structures is investigated. Samples with a comb-comb structure were treated with NaOH solution, ...
IEEE

Elimination of Leakage in NaOH-Activated Cu/SiO

Abstract: In this study, the effect of NaOH wet treatment on the leakage current in Cu/SiO2 hybrid structures is investigated. Samples with a comb-comb structure were treated with NaOH solution, ...