CMP装置〜先端ロジック/3次元半導体/チップレット..ナノレベルの平坦化を実現！
semi-engineers.com
CMP装置〜先端ロジック/3次元半導体/チップレット..ナノレベルの平坦化を実現！
半導体製造において欠かせない工程の一つ、化学的機械研磨（CMP）。CMPとは、Chemical Mechanical Polishingの略で「化学的機械的研磨」と呼ばれる工程です。この工程は、平坦化（Planarization）とも呼ばれ...
8 aug. 2022
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Explained: chemical vapor deposition
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